Characterization and applications of high density Oxygen plasma downstream

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dc.contributor.authorWickramanayaka, S.W.M.S.
dc.date.accessioned2021-06-09T14:38:12Z
dc.date.available2021-06-09T14:38:12Z
dc.date.issued1992
dc.format.extentxiii,131p.:ill, table
dc.identifier.degreePhD
dc.identifier.universityShizuoka University
dc.identifier.urihttps://dl-ifs.nsf.gov.lk/handle/1/1964
dc.subjectEngineering and Technology
dc.titleCharacterization and applications of high density Oxygen plasma downstream
dc.typeThesis

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